Semiconductor Fabs
Fab facilities and EHS teams keep every gas stick, weld, and scrubber on a signed inspection record, from the sub-fab to the cleanroom, on one standard across US, EU, and Asia sites.
Where it runs
Every gas stick, weld, and scrubber keeps its leak check, its corrosion trend, and its permit on one record.
Gas sticks · high-purity welds · abatement · UPW lines
The systems that carry the run
Gas delivery, high-purity piping, abatement, and the permits that let anyone touch them each keep the fab running. One module owns each job, and every result lands on the same record.
02 layers · scroll to stack
Cleanroom crews run valve manifold box leak checks, pigtail swaps, and SEMI F81 weld acceptance on offline intelliINSPECT wizards, each result signed against the tool the line feeds.
intelliNDT turns UT thickness readings on acid-exhaust ducting and scrubber shells into corrosion rates and remaining life, so replacement is scheduled on the data, ahead of the failure.
Hot work near a silane header, LOTO on a chemical dispense system. intelliCOMPLY routes every permit and JSA to an owner and closes it with proof the AHJ reads against NFPA 318 and IFC hazardous production material controls.
intelliPROJECTS holds facility shutdown scope, gas-system tie-ins, and restart gates in one plan, so the fab comes back up on schedule with every system verified, not vouched for.
One record, gowned in
The proof stays with the line, from the stick in the sub-fab to the signature the AHJ reads.
One record, gowned in
A technician gowns in, opens the VMB checklist offline, logs the helium leak reading and fitting torque, and signs at the panel. No paper leaves the cleanroom.
The reading syncs and the platform re-runs the math. A drift past tolerance flags the stick, opens a corrective action with an owner and a due date, and resets the interval to SEMI F-series practice.
When the AHJ or the insurer asks, the fab exports every check, verdict, and closeout on that line as one query, mapped to SEMI S2 and NFPA 318, for any site in the network.
How it runs
Captures weld visual acceptance on high-purity gas and UPW lines to SEMI F81, offline in the cleanroom.
intelliNDTComputes acid-exhaust and abatement corrosion rate and remaining life, resetting intervals on each reading.
intelliCOMPLYThreads HPM permits, hot work, and LOTO into one NFPA 318 and IFC-ready audit trail.
intelliPROJTURNHolds facility shutdown scope, gas-system tie-ins, and restart gates so the fab powers back up verified.
Evaluation path
Semiconductor Fabs · next step
Bring one fab's gas-system routine and we will walk the record from the stick to the signature.
Answers
Yes. Gas-delivery leak checks, interlock verification, and abatement testing are captured as structured records against SEMI S2 equipment safety and SEMI S8 criteria, held against the specific tool, with lapses surfaced before an audit finds them.
Crews run VMB checklists on intelliINSPECT offline in the cleanroom, logging leak readings, purge checks, and pigtail replacement to SEMI F-series practice. Each stick carries its own history, tied to the tool it feeds.
Yes. Visual weld acceptance is captured to SEMI F81 criteria in intelliINSPECT, with photos, inspector signature, and timestamp on each joint, so the weld map survives the contractor who made it.
Fabs use intelliCOMPLY to route HPM permits, hot work, JSAs, and LOTO to owners with closeout proof, building the audit trail that NFPA 318 and IFC hazardous material chapters expect.
Yes. intelliNDT computes corrosion rate and remaining life from UT thickness readings on acid-exhaust ducting, scrubber shells, and burn-box headers, so replacement lands on a schedule instead of an alarm.
Yes. Inspections capture fully offline on a gowned-in tablet and sync when the technician exits, so ISO 14644 protocol and dead zones in the sub-fab never break the record.
Yes. intelliPROJECTS tracks shutdown scope, gas-system tie-ins, and restart readiness gates in one plan, so every system is verified with a signature before the fab powers back up.
